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Note: This discussion is about an older version of the COMSOL Multiphysics® software. The information provided may be out of date.

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Contact mode capacitive pressure sensor modeling

Posted 2014年10月28日 GMT-4 00:39 MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.4 3 Replies

Xin Luo
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Hello,

I want to model the contact mode capacitive pressure sensor using electromechanics module, but I do not know how to set the contact condition. For the contact mode pressure sensor, there are two insulating layer coated on two electrodes located on diaphragm and substrate respectively. The total thickness of two insulation layers defines the final spacing between terminal and ground when contacted (so that the capacitance can be calculated). I defined contact pair between the two facing surfaces of coating layers. However, if I only define air (in the chamber) as electrical material model, I could not select the electrode boundary (as a internal boundary between electrode and the coating layer) as terminal or ground. If I include the coating layers in the electrical material model, one of the contact pair is "not applicable" in the "electromechanics-->pairs-->structural-->contact". Could any one who has relevant experience tell me where the problem is?

This problem is really frustrating, thanks so much!
3 Replies Last Post 2014年11月3日 GMT-5 11:49
Xin Luo
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Posted: 1 decade ago 2014年10月28日 GMT-4 12:12
Could anyone help me with this? Thanks!

Could anyone help me with this? Thanks!
Xin Luo
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Posted: 1 decade ago 2014年11月2日 GMT-5 21:02
Still have this problem, does anyone have any idea? Thanks so much!
Still have this problem, does anyone have any idea? Thanks so much!
Xin Luo
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Posted: 1 decade ago 2014年11月3日 GMT-5 11:49
Hello,

I attached the file I am working on. This is a 2D axis simulation using Electromechanics module. The drawing is a cross section view of a capacitive pressure sensor with upper and lower electrodes both coated with Al2O3 insulation layer. I defined two insulation layers as contact pair. I am trying to sweep pressure applied on the top boundary until the diaphragm touches the substrate (actually two insulation layers get touched). I followed the microgripper example (www.comsol.eu/model/piezoelectric-actuated-microgripper-4695), but when once it touches, error will come up and the simulation stops.

Hope anyone here will give me a suggestion.

Thanks,
Xin
Hello, I attached the file I am working on. This is a 2D axis simulation using Electromechanics module. The drawing is a cross section view of a capacitive pressure sensor with upper and lower electrodes both coated with Al2O3 insulation layer. I defined two insulation layers as contact pair. I am trying to sweep pressure applied on the top boundary until the diaphragm touches the substrate (actually two insulation layers get touched). I followed the microgripper example (http://www.comsol.eu/model/piezoelectric-actuated-microgripper-4695), but when once it touches, error will come up and the simulation stops. Hope anyone here will give me a suggestion. Thanks, Xin

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