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Stiffness matrix of Si in (111) plane
Posted 2014年11月3日 GMT-5 20:13 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Structural Mechanics Version 4.2a 1 Reply
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I want to simulate a resonator on a silicon (111) wafer, so I need the stiffness matrix in this plane. COMSOL provides the stiffness matrix in (100). So I tried Ville's matlab file (www.kaajakari.net/~ville/research/tutorials/elasticity_tutorial.pdf) and used changed rotation matrix to obtain the stiffness matrix in (111). The rotation matrix I used is
% Rotation matrix
Q=[
[-1/sqrt(6) -1/sqrt(6) 2/sqrt(6)];
[ 1/sqrt(2) -1/sqrt(2) 0];
[ 1/sqrt(3) 1/sqrt(3) 1/sqrt(3)];
];
But the result looks not right. Could anyone tell me what the problem is and how to solve this? Thanks.
James
Hello James
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Can you tell me what makes your result not look right? What are you exactly getting? A constant Young's modulus?