Menu

Discussion Forum

New Discussion
查找

Note: This discussion is about an older version of the COMSOL Multiphysics® software. The information provided may be out of date.

Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.

difference between Capacitively coupled plasma and AC-DBD

Posted 2015年2月11日 GMT-5 10:38 Plasma Physics, Fluid & Heat, Modeling Tools & Definitions, Parameters, Variables, & Functions Version 4.4 2 Replies

Syed Zaid Ali
Send Private Message Flag post as spam

Please login with a confirmed email address before reporting spam

Hello Everyone !

Can anyone help me in understanding the difference between capacitively coupled plasma (CCP) and an AC-DBD?

I appreciate your effort and help.

Thanks a lot!!

Best regards
Zaid
2 Replies Last Post 2016年5月23日 GMT-4 09:39
Daniel Smith COMSOL Employee

Please login with a confirmed email address before reporting spam

Posted: 10 years ago 2015年2月11日 GMT-5 12:30
Hi, a DBD usually has 2 dielectric surfaces adjacent to the plasma and operates at frequencies in the kHz range. A capacitively coupled plasma usually has one dielectric surface adjacent to the plasma, the rest are grounded. They typically operate in the MHz range. From a modeling perspective, the equations solved are identical, only the driving frequency and selection for the boundary conditions are different.
Hi, a DBD usually has 2 dielectric surfaces adjacent to the plasma and operates at frequencies in the kHz range. A capacitively coupled plasma usually has one dielectric surface adjacent to the plasma, the rest are grounded. They typically operate in the MHz range. From a modeling perspective, the equations solved are identical, only the driving frequency and selection for the boundary conditions are different.
Arnold Huang
Send Private Message Flag post as spam

Please login with a confirmed email address before reporting spam

Posted: 9 years ago 2016年5月23日 GMT-4 09:39
Hi, Smith
I would like to ask a general question regarding a capacitor at high frequency (60 MHz up).
As we know, a changing electric field acts to produce a oscillating magnetic filed.
However, when there is a magnetic field that is varying, there will also be induced electric fields.
This means that the electric field cannot be the same at all distances from the capacitor center.

I need to study high frequency transient electric and magnetic fields together in one model, with coupled effects.
Could you give me a hint, how to simulate "standing wave profile" phenomenon in comsol?
Hi, Smith I would like to ask a general question regarding a capacitor at high frequency (60 MHz up). As we know, a changing electric field acts to produce a oscillating magnetic filed. However, when there is a magnetic field that is varying, there will also be induced electric fields. This means that the electric field cannot be the same at all distances from the capacitor center. I need to study high frequency transient electric and magnetic fields together in one model, with coupled effects. Could you give me a hint, how to simulate "standing wave profile" phenomenon in comsol?

Note that while COMSOL employees may participate in the discussion forum, COMSOL® software users who are on-subscription should submit their questions via the Support Center for a more comprehensive response from the Technical Support team.

Suggested Content