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Glass Blowing on a Wafer Level
Posted 2015年4月27日 GMT-4 00:00 2 Replies
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Dear all,
I am pretty new in doing material deformation problem. Here, some cylindrical cavities are etched in the silicon wafer and a borosilicate glasswafer (Pyrex 7740) is anodically bonded to the silicon wafer.Due to the high temperature, the pressure of the trapped air inside the sealed cavities increases and the glass deforms into spherical shapes. I would like to simulatethis process. The schematic drawing is as the attached picture. Does anyone have the idea how to perform this kind of modeling? Any input will be very thankful.
Joe
I am pretty new in doing material deformation problem. Here, some cylindrical cavities are etched in the silicon wafer and a borosilicate glasswafer (Pyrex 7740) is anodically bonded to the silicon wafer.Due to the high temperature, the pressure of the trapped air inside the sealed cavities increases and the glass deforms into spherical shapes. I would like to simulatethis process. The schematic drawing is as the attached picture. Does anyone have the idea how to perform this kind of modeling? Any input will be very thankful.
Joe
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2 Replies Last Post 2015年4月27日 GMT-4 23:23
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Posted:
10 years ago
Hi Joe,
You may not need a full FSI analysis for this problem (depending on the details of course). Check out COMSOL Model Gallery ID 206 to see how they modeled the sealed air. You can modify that to include the expansion resulting from temperature. I also described a similar approach briefly in this FSI webinar: www.comsol.com/video/simulating-fluid-structure-interaction-comsol-multiphysics
Nagi Elabbasi
Veryst Engineering
You may not need a full FSI analysis for this problem (depending on the details of course). Check out COMSOL Model Gallery ID 206 to see how they modeled the sealed air. You can modify that to include the expansion resulting from temperature. I also described a similar approach briefly in this FSI webinar: www.comsol.com/video/simulating-fluid-structure-interaction-comsol-multiphysics
Nagi Elabbasi
Veryst Engineering
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Posted:
10 years ago
Dear Nagi Elabbasi,
Thank you so much for your reply. Your suggestions are very helpful for me.
one more question: At high temperature ,the glass wil be glassy state and it deforms into spherical shapes.But the only physical field of deformation i found in comsol was the solid mechanics,so how to define the deformation of the model which in glassy state.Whether is applicable to solid mechanics？
Good luck
Thank you so much for your reply. Your suggestions are very helpful for me.
one more question: At high temperature ,the glass wil be glassy state and it deforms into spherical shapes.But the only physical field of deformation i found in comsol was the solid mechanics,so how to define the deformation of the model which in glassy state.Whether is applicable to solid mechanics？
Good luck