论文和技术资料

This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the periodic (ac) Joule heating. The transient heat conduction equation for each component (i.e., the low-doped heater region, the high-doped constriction region, and the high-doped leg region) is solved using the general heat transfer module for DC component. To include the AC current harmonics and the periodic heating operation, the joule-heating interface under the electrothermal interaction on COMSOL Multiphysics® software is used. The results demonstrate that the high frequency behavior of the cantilever is closely related to thermal diffusion restricted in the heater region.