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Design and Simulation of a Piezoelectric Actuated Valveless Micropump

J. J. Rojas [1], J. E. Morales [2],
[1] School of Electromechanical Engineering, Instituto Tecnológico de Costa Rica, Cartago, Costa Rica
[2] School of Electronic Engineering, Instituto Tecnológico de Costa Rica, Cartago, Costa Rica
发布日期 2015

Microfluidics is a multidisciplinary field, basically it designs systems to handle small volumes of fluids. Most applications require a pumping action in order to move the fluid trough the system. For most of them a micro scale active pump is highly desirable. A piezoelectric micropump is modeled, the actuator is a PZT-5H piezo-disk and the diaphragm is a borosilicate glass plate. COMSOL Multiphysics® software was used to choose the right membrane to piezo thickness relation and to simulate the pumping system under a sinusoidal voltage applied to the piezo actuator.

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