MEMS Gas-Chromatographer Pre-Concentrator Multiphysics Simulation

G. Spinola Durante1, Arno Hoogerwerf1, Dara Bayat Zaman1
1CSEM SA
发布日期 2024

The objective of this simulation model is to enhance the thermal behavior in a MEMS Gas-Chromatographer (GC) pre-concentrator for Volatile Organic Compounds (VOCs) carried by Helium gas. The simulation plays a critical role in estimating voltages, thermal time constants, and spatial temperature uniformity within the TENAX polymer material filling the pre-concentrator chip. Precise and rapid temperature control is essential for optimal VOC desorption from the TENAX polymer. By inducing a fast thermal pulse, we can release highly concentrated VOCs into the carrier gas (Helium) exiting the pre-concentrator, leading to more accurate VOC detection and quantification. This project, funded by ESA, involves the complete development of the MEMS GC concept at CSEM.