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Modeling the Thermally Induced Curvature of Multilayer Coatings with COMSOL MultiphysicsTM

H. Conrad[1], T. Klose[2], T. Sandner[2], D. Jung[1], H. Schenk[2], and H. Lakner[1,2]
[1]Semiconductor and Microsystems Technology Laboratory, Technische Universität Dresden, Germany
[2]Fraunhofer Institute for Photonic Microsystems Dresden, Germany
发布日期 2008

Within this paper the so called “birth and death” method is demonstrated in use with COMSOL Multiphysics®. With this method the free and reactionless movement of a solid structure on deformed geometries and the activation of this solid structure at later simulation steps is possible. For demonstrating the benefit, this method was applied to simulate the thermal induced bending of multilayer coatings. This method is more accurate than standard bulk approaches because it is possible to calculate the influence of layer deposition on deformed substrates.

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