论文和技术资料

We have developed a piezoelectrically controlled MEMS drug delivery device for on-demand release of defined quantities of drug. A drug-loaded micro reservoir (∅6mm×550µm) is sealed by A membrane placed over the drug reservoir on which the piezoelectric material is deposited. On application of voltage across this piezoelectric material , the membrane deflects allowing the fluid to fill into the chamber which will mix with the drug and due to concentration variation the drug would come off the reservoir or vice versa. A 0.3µm-thick PZT material is deposited on the 20um PDMS membrane. Discharge of the drug solution and the release rates are controlled by an external electric field.