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在 2025 年 COMSOL 用户年会上，来自全球的科研人员和工程师展示了他们的多物理场仿真成果。欢迎浏览相关技术论文和演示文稿，了解您所在行业的研究人员当前如何利用数值建模优化产品设计、简化工作流程并改进产品性能。

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ISBN: 978-1-7364524-0-0

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MEMS and Nanotechnology

2020 - All

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Finite Element Analysis of Planar Microcoil Based Induction-balance Magnetic MEMS Sensor

Krishnapriya S¹, Suja K J², Rama Komaragiri³
¹Department of ECE. Muthoot Institute of Technology, India
²NIT Calicut, Calicut, Kerala India
³Bennett University, Greater Noida, Uttar Pradesh, India

Two transmitting planar microcoils (TX1, TX2) and one receiving microcoil (RX) are employed as shown in Fig.1 ... 扩展阅读

Optimization of Microfabricated 2D Planar Spiral Microcoils for the Micro NDT of Grinding Burn

Isman Khazi¹, Andras Kovacs¹, Rui Zhu¹, Ulrich Mescheder¹
¹Institute for Microsystem Technology(iMST), Furtwangen University, 78120 Furtwangen, Germany

Cylindrical grinding has become an integral part of machining of workpieces with an ultra-high precision and ... 扩展阅读

Multiphysics Simulation of Internal Discharge in Nanodielectric

F. Alam¹, MA. Rab²
¹UnitedHealth Group, Minneapolis, MN, USA
²Norfolk State University, Norfolk, VA, USA

This research work investigates the effect of inclusion of small amount (0%, 2% and 6%) of natural Nano ... 扩展阅读

3D Modeling of Nanocomposites

MA. Rab¹, F. Alam²
¹Norfolk State University, Norfolk, VA, USA
²UnitedHealth Group, Minneapolis, MN, USA

Current research focus on improvement of electrical, mechanical, surface characteristics of polypropylene ... 扩展阅读

Thermomechanical Properties of Elastomeric Stamps for Micro-Transfer Printing Applications

C. Reyes¹, K. Oswalt ¹, J. Thostenson¹, J. Roe¹, D. Gomez¹
¹X-Celeprint, Durham, NC, USA

Micro-transfer printing (MTP) enables mass-transfer of wafer-level chips having lateral dimensions ranging ... 扩展阅读

Silicon Nitride Corrugated Membrane with High-Width-Aspect-Ratio for MEMS Microphones

Shubham¹
¹Knowles Electronics, Itasca, IL, USA

Micro-Electro-Mechanical Devices such as acoustics sensors, finger print sensors, tunable capacitors etc. are ... 扩展阅读

Simulation of a Scaled-up Deformable Mirror System Driven by MEMS-Based Lorentz Actuator Arrays

B. Park¹, A. J. Bergren¹, M. Belov¹, G .Burley², C. Shafai³
¹Nanotechnology Research Centre, Edmonton, Canada
²NRC-Herzberg Astronomy & Astrophysics, Victoria, BC, Canada
³Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB, Canada

This paper presents the design and simulation results of a MEMS-actuated deformable mirror (DM) consisting of ... 扩展阅读

Electrostatic Zipping Actuation of a Three-Chamber Peristaltic Micropump

A. Eden¹, S. MacKenzie¹, D. Huber¹, S. Pennathur¹, S. Stettler²
¹University of California, Santa Barbara, Santa Barbara, CA, USA
²University of California, Santa Barbara, Santa Barbara, CA, USA and Ecole Polytechnique Federale de Lausanne, Lausanne, Switzerland

While electrostatic actuators feature prominently among the most widely employed classes of actuators for ... 扩展阅读

Finite Element Modeling of an AlGaN/GaN Based VOC Sensor Using COMSOL®

B. Uppalapati¹, G. Koley¹, A. Kota²
¹Clemson University, Clemson, SC, USA
²University of Dayton, Dayton, OH, USA

Volatile organic compounds (VOCs) are a large group of chemicals that can be found in many products that we ... 扩展阅读

Understanding the Physics of Droplet Electrocoalescence in a Microtrap

B. Koppolu¹, S. P. Burugupally¹, F. B. Memon¹
¹Wichita State University, Wichita, KS, USA

Droplet-based microfluidic systems are emerging as an ideal platform for the high-throughput screening of ... 扩展阅读

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