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MEMS and Nanotechnology

Simulation of Thermal Sensor for Thermal Control of a Satellite using COMSOL

G. Mangalgiri
BITS Pilani
K K BIRLA GOA CAMPUS
Zuarinagar, Goa
India

Spacecrafts have a prime necessity that their temperature be controlled. This paper presents the simulation ... 扩展阅读

Carbon MEMS Accelerometer

J. Strong, and C. Washburn
Sandia National Laboratories
Albuquerque, NM

The newly emerging field of carbon-based MEMS (C-MEMS) attempts to utilize the diverse properties of carbon ... 扩展阅读

Design of a MEMS Capacitive Comb-drive Accelerometer

T. Kaya[1], B. Shiari[2], K. Petsch[1], and D. Yates[2]
[1]Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
[2]University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI

In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring ... 扩展阅读

Simulations of MEMS Based Piezoresistive Accelerometer Designs in COMSOL

N. Bhalla[1], S. Li[2], and D. Chung[1]
[1]Chung Yuan Christian University, Taiwan, (R.O.C)
[2]National Tsing Hua University, Taiwan, (R.O.C)

Different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. ... 扩展阅读

Coupled Electromagnetic - Dynamic FEM Simulation of A High Frequency MEMS Energy Harvester

E. Topal
Middle East Technical University
Ankara
Turkey

In this study, a detailed finite element model coupling the motion dynamics and electromagnetics of a ... 扩展阅读

Multi-Domain Analysis of Silicon Structures for MEMS Based-Sensors

N. Bhalla[1], S. Li[2], and D. Chung[1]
[1]Chung Yuan Christian University, Chungli,Taiwan
[2]National Tsing Hua University, Hsinchu, Taiwan

Investigation in this paper aims at performing Mechanical Stress Strain analysis, Thermal, Piezoresistive and ... 扩展阅读

Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements

S. Cerimovic[1], R. Beigelbeck[2], H. Antlinger[3], J. Schalko[2], B. Jakoby[3], and F. Keplinger[1]
[1]Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
[2]Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
[3]Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria

A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is ... 扩展阅读

Effect of Mass Adsorption on a Resonant NEMS

J. J. Ruz Martinez
Instituto de Microelectronica de Madrid
Tres Cantos
Madrid, Spain

The motion of a resonant NEMS has been widely studied for many different applications such as structural ... 扩展阅读

COMSOL API Based Toolbox for the Mixed-Level Modeling of Squeeze-Film Damping in MEMS: Simulation and Experimental Validation

M. Niessner[1], G. Schrag[1], J. Iannacci[2], and G. Wachutka[1]
[1]Institute for Physics of Electrotechnology, Munich University of Technology, Munich, Germany
[2]MEMS Research Unit, Fondazione Bruno Kessler, Povo di Trento, Italy

We present an easy-to-use toolbox for the automated generation of reduced-order mixed-level models for the ... 扩展阅读

Ferromagnetic Materials for MEMS- and NEMS-Devices

A. Weddemann, J. Jadidian, S. Khushrushahi, Y. Kim, and M. Zahn
Research Laboratory of Electronics
Massachusetts Institute of Technology
Cambridge MA

The modeling of ferromagnetic materials is a challenging task of high industrial and academic impact. Thin ... 扩展阅读

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