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Modelling Capacitance voltage graph in MIM structures with low k dielectrics

Posted 2014年3月25日 GMT-4 14:08 Version 4.4 0 Replies

Vivek Verma
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I am working on copper comb comb structures with SiCOH dielectrics in between, trying to study the mechanisms of time dependent dielectric breakdown. For this I am conducting C-V experiments on probe station to interpret how the curve changes with the stress and breakdown.
So I want to make a COMSOL model for simulating C-V measurements in comb-comb structures.
Any help is appreciated.
Thanks!
0 Replies Last Post 2014年3月25日 GMT-4 14:08
COMSOL Moderator

Hello Vivek Verma

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