Simulation for Semiconductor Innovation

Engineers and researchers developing semiconductor equipment and devices benefit from incorporating the COMSOL Multiphysics® simulation software into their workflow.

The COMSOL Multiphysics® software features a consistent user experience, regardless of engineering application and physics phenomena. For the semiconductor processing industry, there are several add-on products that provide specialized functionality for modeling plasma, molecular flow, particle tracing, heat transfer, and semiconductor devices.

Real-World Semiconductor Simulation Examples

Ionization Gauges

Ionization gauge model.

INFICON used simulation to guide their design of a more precise, robust, and reproducible tool for measuring HV/UHV conditions.

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Wet Processes

Chemical etching model.

Tokyo Electron uses simulation for understanding the physics and chemical processes at the nanoscale to then develop and improve the wafer liquid processes.

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Memory Chip Manufacturing

A schematic of a multidisc ejector for chip manufacturing.

Engineers optimized the manufacturing process to keep up with demands for smaller chips with greater memory capacity.

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Photolithography Systems

An air bearing model showing deformation in the Rainbow color table.

ASML built multiphysics models and simulation applications to help them design components for photolithography systems more efficiently.

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