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A Study of Lubricating Flows in MEMS Bearings

E. Gutierrez-Miravete[1], and J. Streeter[2]

[1]Department of Engineering and Science, Rensselaer at Hartford, Hartford, Connecticut, USA
[2]Optiwind, Torrington, Connecticut, USA
发布日期 2009

The bearing and shaft are part of a safe and arm device constructed as an assembly by a multi-layer additive/subtractive plating and planarization processes (EFAB technology). Devices are constructed by a multi-layer additive/subtractive planarization process. This paper evaluates the lubricating flow between the shaft and journal of the MEMS bearing for seven configurations. The pressure differential was used to rank the designs. In this work the lubricating behavior of a MEMS bearing has been investigated using the CFD module in COMSOL Multiphysics.

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