论文和技术资料

This literature reviews the simulation of specific oxide coated MEMS based gas sensor analysis with various parameters such as power consumption, temperature uniformity, resistance change, sensitivity and selectivity etc. The property of the sensing layer of the device to change its resistance according to the gas it is exposed to is used to achieve the desired result. This instantaneous detection of gases finds its application in the detection of cancer cells. The gas sensor employs a mesh type poly silicon micro-hotplate structure. The sensor uses a very thin film made of conducting material that detects the Volatile Organic Compounds (VOCs) liberated by the cancer cells. Some of the VOCs liberated by cancer cells are 2-Methyl Pentane, decadien-1-ol, Cyclohexanol etc. The temperature generated by the hot plate influences factors such as the conductance of the film and the quantity of gas adsorbed on the film. When the thin film is brought to the right boiling point, the residual vapor particles evaporate. For effective sensing of the VOCs we optimize the supply voltage (around 3V) and the uniformity in temperature of the micro heater was analyzed (799.38K) along with the selectivity and sensitivity. For the gas sensing analysis, we have compared the sensitivity of thin film coating of specific oxide material(SOM). The design was simulated by means of joules heating, thermal expansion, Electric Current FEM simulations.