Finite Element Analysis of BAW Sensor
Achieving passive device working over two GHz bands for next generation mobile phone has been strongly desired. This paper investigated the spurious mode suppression for the BAW resonator. The border-frame technique which has been proposed in many literatures is examined here numerically. It was found that the present finite-element analysis using COMSOL Multiphyiscs® was validated via comparison with existing finite-element computation for flat electrode, and that it could reproduce the suppression of the spurious modes by using the border-frame technique. Furthermore, the present study clarified by visualizing the structural vertical displacement of the top electrode surface that the suppression mechanism was due to the attenuation of the lateral wave along the surface of the top electrode.
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