Heat Transfer and Phase Transformation on Matrix Assisted Pulsed Laser Evaporation (MAPLE) of Biocompatible Thin Layers

E. Lacatus[1], G.C. Alecu[1], M.A. Sopronyi[2], A. Tudor[1]
[1]POLITEHNICA University of Bucharest, Bucharest, Romania
[2]INFLPR -National Institute for Laser Plasma and Radiation Physics, Bucharest, Romania
发布日期 2013

Matrix Assisted Pulsed Laser Evaporation (MAPLE) technique is used for the deposition of high quality biocompatible polymer thin films. During the deposition process the temperature of the laser target should be kept below 193K to assure the proper quality of both evaporation and deposition phases of the process. On a first approach COMSOL Multiphysics® was used to describe and analyze the current cooling technology using liquid He2 and N2. The SolidWorks model of the present MAPLE technique was exported through LiveLink™ for SolidWorks® in order to identify the present bottlenecks of the process. Addressing the identified issues, a new cooling technology was designed to assist the MAPLE technique. COMSOL Multiphysics® enabled the simulation of the temperature flux distribution during both MAPLE techniques, making possible the accurate interface phenomena analysis.