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Microwave Plasma Simulation Applied to a Double ICP Jet Reactor
发布日期 2011
ICP reactors are usually meter sized and driven at RF frequencies, for example at 13.56 MHz. We developed a miniature resonator allowing an inductive type of coupling of microwaves at 2.45 GHz to a plasma jet, flowing in ceramic tubes. Previous experiments and simulations show an efficient energy transfer of microwaves to plasma of about 80 %.
The new development of our ICP structure contains two ceramic tubes and a symmetrical arrangement of two resonators. The present papers concentrates on a study of this plasma source, considering the complex interaction of the electromagnetic field with the plasma and the gas flow, using the plasma module of COMSOL.
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- porteanu_presentation.pdf - 0.72MB
- porteanu_paper.pdf - 0.83MB