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Simulation of Thermal Transport Based Flow Meter for Microfluidics Applications

E. Byas[1], A. Arevalo[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
发布日期 2013

COMSOL Multiphysics® is used to simulate a thermal transport based flow sensor, which will be embedded in a micro-channel of a Poly-methyl methacrylate (PMMA) based microfluidic device. The channel height is 100μm and for simulation purposes the lengths has been set to 1.2mm. The heater element and the two sensors are made of platinum and were modeled using Heat Transfer in Fluids, Laminar flow and Joule heating interfaces. The three elements have a thickness of 300nm, which can be sputtered and patterned in the real device.

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