论文和技术资料

This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL.

Mode shapes and frequencies are found as functions of geometric parameters, and the results used with a PML support loss analysis to derive an estimate for the device Q. A Joule Heating analysis is coupled to the Structural Mechanics problem, and the variation of the modes and Q factors is examined. The results give optimality conditions on the resonator design, and show that with suitable control, nT sensitivity is accessible.