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在 2026 年 COMSOL 用户年会上，来自全球的科研人员和工程师展示了他们的多物理场仿真成果。欢迎浏览相关技术论文和演示文稿，了解您所在行业的研究人员当前如何利用数值建模优化产品设计、简化工作流程并改进产品性能。

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ISBN: 978-1-7364524-0-0

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MEMS and Nanotechnology

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Towards High-Throughput DNA Synthesis in A Silicon-Based MEMS ‘Virtual Thermal Well’-Array

V. Narayan[1], A. Ferguson[1], Y. Lin[1], B. Kirkpatrick[1], M. Hayes[1], A. Prak[2]
[1]Evonetix Ltd, United Kingdom
[2]Lionix International, Netherlands

Evonetix is a Cambridge-based start-up company working on a revolutionary new technology to synthesize high ... 扩展阅读

Simulation of an AlN PMUT With A Crossed-Slit for Enhanced Acoustic Pressure Outputs in Liquids

V. Tzanov[1], E. Ledesma[1], F. Torres[1], N. Barniol[1]
[1]Universitat Autonoma de Barcelona, Spain

In our work, simulations of a piezoelectrical micromachined ultrasonic transducer compatible with CMOS-MEMS ... 扩展阅读

Multiphysics Simulations for Robust Computational Modelling of Stochastic Nanostructures

J. Tyson[1], T. Rahman[1], S. Boden[1]
[1]University of Southampton, United Kingdom

This work explores the implications of wholly random and non-linear nanostructures on electromagnetic wave ... 扩展阅读

Estimating Parasitic Capacitances in MEMS Microphones using Finite Element Modeling

S. Shubham[1], M. Nawaz[1]
[1]KNOWLES ELECTRONICS, USA

MEMS microphones consist of a conductive backplate and a conductive flexible membrane. The backplate and the ... 扩展阅读

Actuation Force Study of Next Generation Micro Shutter Array for More Reliable Actuation

K. Kim[1], M. Li[2], A. Kutyrev[3], M. Greenhouse[2]
[1]NASA Goddard Space Flight Center/Science Systems and Applications Inc., USA
[2]NASA Goddard Space Flight Center, USA
[3]NASA Goddard Space Flight Center/University of Maryland College Park, USA

Micro shutter array (MSA) is a programmable optical spatial filtering device fabricated by micro electro ... 扩展阅读

Multiphysics Analysis of a Micromirror System

N. Katte[1]
[1]Wilberforce University, USA

The challenge of our current research is to design large aperture MEMS scanning mirrors for Light Detection ... 扩展阅读

Simulation of a Novel Induced-Charge Electrokinetic Actuation Mechanism for a Diaphragm Micropump

A. Eden[1], F. Lorestani[1], S. Mackenzie[1], S. Minne[1], D. Huber[1], C. Meinhart[1], S. Pennathur[1]
[1]University of California, Santa Barbara, USA

From microelectronics cooling to biological analysis and wearable therapeutic infusion systems, micropumps ... 扩展阅读

Impact of Operating Parameters on Precursor Separation in "Air Hockey" Spatial Atomic Layer Deposition Reactor

J. Grasso[1], B. Willis[1]
[1]University of Connecticut, USA

A defining characteristic of atomic layer deposition (ALD) is the sequential exposure of a surface to self ... 扩展阅读

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