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MEMS and Nanotechnology

Finite Element Model of Surface Acoustic Wave Scattering with High-Aspect-Ratio Irregularities

S. Iuliia [1], Y. Sergey [1], K. Sergey [1], P. Alexey [1],
[1] Saratov State University, Saratov, Russia

The design of surface acoustic wave (SAW) devices needs the accurate study of the scattering fields, arising ... 扩展阅读

Modeling and Simulation of Piezoresistive Pressure Sensor for 2bar Application

M. Ramezani [1], M. El Barkouky [1],
[1] Melexis, Tessenderlo, Belgium

In this paper, we focused on modeling of the piezoresistive pressure sensors. The Structural Mechanics Module ... 扩展阅读

Analysis of Geometrical Aspects of a Kelvin Probe

I. Kuehne [1], S. Ciba [1], A. Frey [2],
[1] Heilbronn University, Kuenzelsau, Germany
[2] University of Applied Sciences, Augsburg, Germany

The presented analysis investigates the capacitance characteristic of a Kelvin probe regarding the ... 扩展阅读

Interactive Design of an Electrostatic Headphone Speaker Using COMSOL Server™

B. A. Marmo [1], M. P. Snaith [1],
[1] Xi Engineering Consultants, Edinburgh, United Kingdom

An electrostatic headphone includes many interrelated design elements that affect the frequency response of ... 扩展阅读

Optoelectronic Transducer with an Optical Fiber Transmission Used for Current Measurement

J. Golebiowski [1],
[1] Dept. of Semiconductor and Optoelectronics Devices, Lodz University of Technology, Lodz, Poland

The transducer's construction used for current measurement in medium voltage power lines for current values ... 扩展阅读

Piezoelectric Surface Acoustic Wave (SAW) Device with Simulated Poling Condition

R. Xu [1], M. Guizzetti [1], K. Astafiev [1], E. Ringgaard [1], T. Zawada [1],
[1] Meggitt A/S, Kvistgaard, Denmark

FEM (Finite Element Method) modelling software such as COMSOL Multiphysics® can be a powerful tool for ... 扩展阅读

Development of a Package for a Triaxial High-G Accelerometer Optimized for High Signal Fidelity

R. Langkemper [1], R. Külls [1], J. Wilde [2], S. Nau [1], S. Schopferer [1],
[1] Fraunhofer-Institut für Kurzzeitdynamik, Ernst-Mach-Institut, EMI, Freiburg, Germany
[2] Albert-Ludwigs-Universität Freiburg, Institut für Mikrosystemtechnik, Freiburg, Germany

Acceleration is an important quantity to be measured in high-speed dynamics. A new piezoresistive sensor for ... 扩展阅读

Feasibility Study of Thermal Actuators for MEMS Variable Emittance Radiators

L. Pasqualetto Cassinis [1],
[1] TU Delft, Delft, Netherlands

Based on COMSOL Multiphysics® software, an analysis of an innovative thermal actuation system capable of ... 扩展阅读

Optimization of MEMS Based Capacitive Accelerometer for Fully Implantable Hearing Aid Application

A. Dwivedi [1], G. Khanna [1],
[1] NIT Hamirpur, Hamirpur, Himachal Pradesh, India

This work describes the design and optimization of three prototypes of microelectromechanical systems (MEMS) ... 扩展阅读

MEMS Based Sensor for Blood Group Investigation

M. Kaushik [1], S. Katti [1], V. Saradesai [1], P. Naragund [1], P. Vidhyashree [1], A. K. V. Nandi [1]
[1] B.V. Bhoomaraddi College of Engineering and Technology, Hubli, India

This article describes the design of MEMS based cantilever structure intended for determination of blood ... 扩展阅读

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