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MEMS and Nanotechnology

MEMS Electrostatic Acoustic Pixel

A. Arevalo [1], D. Conchouso [1], D. Castro [1], I. G. Foulds [2],
[1] Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Vancouver, BC, Canada

The growth of the electronics industry demand better components for the electronic systems. Such components ... 扩展阅读

Simulation of a Tether Structure for Ultra-stretchable Monolithic Silicon Fabric

A. Arevalo [1], J. Prieto [1], M. M. Hussain [1], I. G. Foulds [2],
[1] Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Vancouver, BC, Canada

The role of stretchable electronics systems allows the design of new reconfigurable macro-electronics, that ... 扩展阅读

Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening

A. Ivanov [1], U. Mescheder [1],
[1] Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany

Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in ... 扩展阅读

Nanowire Based Flexible Piezoelectric Sensor for Structural Health Monitoring Applications

A. El Kacimi [1], E. Pauliac-Vaujour [1], J. Eymery [2]
[1] University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
[2] University Grenoble Alpes, CEA, Grenoble, France

We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal ... 扩展阅读

Simulation of a Buckled Cantilever Plate with Thermal Bimorph Actuators

A. Arevalo [1], D. Conchouso [1], D. Castro [1], M. Diaz [2], I. G. Foulds [3],
[1] CEMSE Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[3] University of British Columbia, Vancouver, BC, Canada

INTRODUCTION: Micro Electro Mechanical Systems (MEMS) are fabricated with an in-plane fabrication technology. ... 扩展阅读

PVDF Piezoelectric Nanofibers as Hair Cell Substitutes: A Feasibility Study

C. R. Pérez [1], J. J. Santiago-Avilés [2],
[1] Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, PA, USA
[2] Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA

Sensorineural hearing loss is the most common sensory deficit in the world, and within this category damage ... 扩展阅读

Simulation of a Dual Axis MEMS Seismometer For Building Monitoring System

M. A. Shah [1], F. Iqbal [1], B. L. Lee [1],
[1] Korea University of Technology and Education, Cheonan, Chungcheong, South Korea

A dual axis MEMS seismometer targeted for building monitoring system has been simulated for a full scale of ... 扩展阅读

Design and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM)

B. Park [1], T. Chen [1], C. Shafai [1],
[1] Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB, Canada

This poster presents the design and analysis of a novel horseshoe shaped MEMS actuator for adaptive optics. ... 扩展阅读

A Comparison of Mass Reduction Methods for Silicon-on-Oxide (SOI)-based Micromirrors

H. J. Hall [1], L. A. Starman [1],
[1] Sensors Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH, USA

Beam steering and adaptive optics micromirror applications commonly demand optically flat surfaces with ... 扩展阅读

Design, Simulation, and Fabrication of Thermal Angular Accelerometers

H. Alrowais [1],
[1] School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA

This abstract introduces a sensor design for detecting angular acceleration in a single plane using thermal ... 扩展阅读

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