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MEMS and Nanotechnology

Simulation of a Dual Axis MEMS Seismometer For Building Monitoring System

M. A. Shah [1], F. Iqbal [1], B. L. Lee [1],
[1] Korea University of Technology and Education, Cheonan, Chungcheong, South Korea

A dual axis MEMS seismometer targeted for building monitoring system has been simulated for a full scale of ... 扩展阅读

Design and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM)

B. Park [1], T. Chen [1], C. Shafai [1],
[1] Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB, Canada

This poster presents the design and analysis of a novel horseshoe shaped MEMS actuator for adaptive optics. ... 扩展阅读

A Comparison of Mass Reduction Methods for Silicon-on-Oxide (SOI)-based Micromirrors

H. J. Hall [1], L. A. Starman [1],
[1] Sensors Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH, USA

Beam steering and adaptive optics micromirror applications commonly demand optically flat surfaces with ... 扩展阅读

Design, Simulation, and Fabrication of Thermal Angular Accelerometers

H. Alrowais [1],
[1] School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA

This abstract introduces a sensor design for detecting angular acceleration in a single plane using thermal ... 扩展阅读

Numerical Analysis on Plasmonic Nano-Cucumber Achieving Large EFs and Wide Tuneability of the Peak

A. Zare [1], E. Cutler [1], H. Cho [1],
[1] Center for Biomedical Engineering & Science, University of North Carolina - Charlotte, Charlotte, NC, USA

INTRODUCTION: Researchers in the biomedical field have recently become interested in the potential ... 扩展阅读

Statistical Modeling and Contact Analysis of RF MEMS Surface

J. Liu [1], V. B. Chalivendra [1], C. Goldsmith [2], W. Huang [1],
[1] Department of Mechanical Engineering, University of Massachusetts - Dartmouth, Dartmouth, MA, USA
[2] MEMtronics Corporation, Richardson, TX, USA

Radio frequency (RF) micro-electro mechanical system(MEMS) switch works in on/off modes controlled by ... 扩展阅读

Simulation of the Impedance Response of Thin Films as a Function of Film Conductivity and Thickness

Y. Jin [1], S. Kumar [1], R. A. Gerhardt [1],
[1] School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA

Introduction The electrical properties of materials are important in many different applications. In ... 扩展阅读

Evaluation of Efficiency Factors of Commercial Thermoelectric Materials Using COMSOL Multiphysics® Software

K. Cadien [1], S. Seif [1], T. Thundat [1],
[1] Department of Chemical & Materials Engineering, University of Alberta, Edmonton, AB, Canada

We have developed single leg model using COMSOL Multiphysics® software to compute Φ of TE materials without ... 扩展阅读

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