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MEMS and Nanotechnology

Air Damping of Oscillating MEMS Structures: Modeling and Comparison with Experiment

S. Gorelick[1], M. Leivo[1], U. Kantojärvi[1]
[1]VTT Technical Research Centre of Finland, Espoo, Finland

Excessive air damping can be detrimental to the performance of oscillating MEMS components. Complex systems, ... 扩展阅读

Design of Pressure Measuring Cells Using the Unified Material Law

P. Aguirre[1], F. Figueroa[1]
[1]Sensor Technik Wiedemann GmbH, Kaufbeuren, Bayern, Germany

Pressure Sensors are widely used in the automotive industry. Their main use is the dynamic monitoring of ... 扩展阅读

Development of Stress Relief Suspensions for Micro-Machined Silicon Membranes

W. Kronast[1], U. Mescheder[1], B. Müller[1]
[1]Hochschule Furtwangen, Furtwangen, Germany

A new design concept for large (6 mm diameter) dynamically focusing silicon membrane mirrors using ... 扩展阅读

Resonant Frequency Analysis of Quartz Shear Oscillator

T. Satyanarayana[1], V. Sai Pavan Rajesh[2]
[1]NPMASS Centre, Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra Pradesh, India
[2]Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra Pradesh, India

The most commonly used type of resonator is the AT-cut, where the quartz blank is in the form of a thin plate ... 扩展阅读

Surface Acoustic Wave Properties (SAW) and Acoustic Streaming Characterization for Annular and Curved Electrodes on 128˚ Y-Cut, X-Propagating LiNbO3

G. Potter[1], N. Tokranova[1], S. Gattu[1], J. Castracane[1]
[1]SUNY College of Nanoscale Science and Engineering, Albany, NY, USA

Microfluidic devices and lab-on-a-chip (LOC) require the ability to transport or pump reagents or reaction ... 扩展阅读

Modeling and Simulation of Piezoelectric Materials for Comparison to Experimental Data

E. Nesvijski[1,2], R. Sahul[2]
[1]Western New England College, Springfield, MA, USA
[2]TRS Technologies, State College, PA, USA

Finite element analysis (FEA) is a modern tool for exploration of new horizons in science, technology and ... 扩展阅读

Sensitivity Optimization of Microfluidic Capacitance Sensors

S. Satti[1], M. Baghini[1]
[1]Indian Institute of Technology Bombay, Mumbai, Maharashtra, India

As a part of a lab-on-chip-device, more often it is required to measure dielectric constant of the fluid. For ... 扩展阅读

Sensitivity Analysis of Different Models of Piezoresistive Micro Pressure Sensors

S. Meenatchisundaram[1], S. M. Kulkarni[2], S. Bhat
[1]Department of Instrumentation and Control Engineering, Manipal Institute of Technology, Manipal, Karnataka, India.
[2]Department of Mechanical Engineering, National Institute of Technology, Surathkal, Karnataka, India.

Piezoresistive pressure sensors have received much attention over the years because of low cost, simple ... 扩展阅读

Electrohydrodynamic Micropump Modeling for Performance Optimization

A. Mulye[1], S. Potnis[2]
[1]Northeastern University, Boston, MA, USA
[2]VIT, Mumbai, Maharashtra, India

We present an optimized and efficient design of an electrohydrodynamic (EHD) micropump for high performance ... 扩展阅读

Efficient Anchor Design for Quality Factor Enhancement in a Silicon Nitride-on-Silicon Lateral Bulk Mode Resonator

U. Rawat[1], A. DasGupta[1], D. R. Nair[1], V. V. Pasula[1]
[1]Department of Electrical Engineering, Indian Institute of Technology Madras, Chennai, Tamil Nadu, India

Anchor loss causes a reduction in the quality factor of high frequency micromechanical resonators. This study ... 扩展阅读

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