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MEMS and Nanotechnology

Computational Analysis of Evaporation in Tailored Microchannel Evaporators

S. Arslan[1], J. Brown[1]
[1]Lawrence Technological University, Southfield, MI, USA

The rapid increase in power densities of integrated circuits has induced a significant interest in new ... 扩展阅读

Passive Microsensor Based on LC Resonators for Substance Identification

D.A. Sanz Becerra[1], E.A. Unigarro Calpa[1], J. Osma[1], F. Segura[1]
[1]Universidad de los Andes, Bogotá, Colombia

A scheme for inductive wireless powering and readout of passive LC sensor is presented. The sensor’s inductor ... 扩展阅读

Simulation and Fabrication of Wireless Passive MEMS Pressure Sensor

E.A. Unigarro Calpa[1], D.A. Sanz Becerra[1], A. Arciniegas[2], F. Ramirez[1], F. Segura-Quijano[1]
[1]Universidad de los Andes, Bogotá, Colombia
[2]Instituto Barraquer de América, Bogotá, Colombia

A wireless passive pressure sensor and the measurement system were design and simulated using COMSOL 4.3. The ... 扩展阅读

The Effects of the Electrical Double Layer on Giant Ionic Currents through Single Walled Carbon Nanotubes

G. Zhang[1][,][2][,][3], S.L. Bearden [1]
[1]Department of Bioengineering, Clemson University, Clemson, SC, USA
[2]Department of Electrical and Computer Engineering, Clemson University, Clemson, SC, USA
[3]Institute for Biological Interfaces of Engineering, Clemson University, Clemson, SC, USA

Electrofluidic transport through a single walled carbon nanotube (SWCNT) is enhanced by electroosmosis. ... 扩展阅读

Surface Plasmon Resonance

J. Crompton[1], S. Yushanov[1], L.T. Gritter[1], K.C. Koppenhoefer[1]
[1]AltaSim Technologies, Columbus, OH, USA

The resonance conditions for surface plasmons are influenced by the type and amount of material on a surface. ... 扩展阅读

Modeling and Prediction of Line Pattern Collapse

D. Bassett[1], M. Carcasi[1], W. Printz[1]
[1]Tokyo Electron America, Austin, TX, USA

In semiconductor manufacturing, effective cleaning of structures with liquid is one of the most important and ... 扩展阅读

A Study of the Effects of Mounting Supports, and Dissipation on a Piezoelectric Quartz Double-Ended Tuning Fork Gyroscope

G. Choi[1], Y. Yong[1]
[1]Rutgers University, New Brunswick, NJ, USA

A COMSOL model of a piezoelectric quartz double ended tuning fork gyroscope was implemented. The gyroscope ... 扩展阅读

Multiphysics FEM Simulations Approach for Development of a MEMS Heat Generator

G. S. Masi[1], S. V. De Guido[1], G. Montagna[2], C. Martucci[2], P. M. Congedo[1], L. Vasanelli [1], M. G. Manera[2], R. Rella[2]
[1]Department of Innovation Engineering, University of Salento, Lecce, Italy
[2]CNR-IMM, Lecce, Italy

Introduction: Accurate fluid temperature control in microfluidic channels is a requirement for many lab-on ... 扩展阅读

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