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MEMS and Nanotechnology

The Fabrication of a New Actuator Based on the Flexoelectric Effect

S. Baskaran[1], S. Thiruvannamalai[1], N. Ramachandran[1], F.M. Sebastian[1], and J.Y. Fu[1]
[1]State University of New York at Buffalo, Buffalo, New York, USA

This paper presents a novel methodology towards the design, analysis, and the fabrication process involved in ... 扩展阅读

Multiphysics Simulation of the Effect of Sensing and Spacer Layers on SAW Velocity

P. Zheng[1,4], D.W. Greve[2,4], and I.J. Oppenheim[3,4]

[1]Department of Physics, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA
[2]Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA
[3]Department of Civil and Environmental Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA
[4]National Energy Technology Laboratory, Pittsburgh, Pennsylvania, USA

Surface acoustic wave gas sensors use a chemically sensitive resistive layer to detect gas concentration. The ... 扩展阅读

The Origin of Mass-change Sensitivity within Multi-layered, Non-uniform, Piezoelectrically-actuated Millimeter-sized Cantilever (PEMC) Biosensors: Vibrational Analysis through Experiment and Finite Element Modeling (FEM)

B.N. Johnson[1], and R. Mutharasan[1]

[1]Department of Chemical and Biological Engineering, Drexel University, Philadelphia, Pennsylvania, USA

A 3D finite element model (FEM) of the PEMC sensor was developed to characterize the modes of vibration that ... 扩展阅读

Nanoscale Heat Transfer using Phonon Boltzmann Transport Equation

S. Sihn[1,2], and A.K. Roy[2]

[1]Air Force Research Laboratory, Wright-Patterson Air Force Base, Dayton, Ohio, USA
[2]University of Dayton Research Institute, Dayton, Ohio, USA

COMSOL Multiphysics was used to solve a phonon Boltzmann transport equation (BTE) for nanoscale heat ... 扩展阅读

COMSOL Multiphysics Modeling of Rotational Resonant MEMS Sensors with Electrothermal Drive

S. Nelson[1], and M. Guvench[1]
[1]University of Southern Maine, Gorham, Maine, USA

COMSOL Multiphysics is employed to model, simulate and predict the performance of a high Q, in-plane ... 扩展阅读

Microfluidic Separation System for Magnetic Beads

F. Wittbrach, A. Weddemann, A. Auge, and A. Hütten
Department of Physics, Bielefeld University, Germany

It is possible to control the motion of magnetic beads using a combination of hydrodynamic and ... 扩展阅读

Interfacing Continuum and Discrete Methods: Convective Diffusion of Microparticles and Chemical Species in Microsystems

J. Berthier
CEA-LETI, Department of Biotechnology, Grenoble, France

Convective transport of macromolecules or micro and nanoparticles in microsystems are usually predicted by ... 扩展阅读

Design for Reliability and Robustness through Probabilistic Methods in COMSOL Multiphysics with OptiY

T.-Q. Pham[1], H. Neubert[2], and A. Kamusella[2]
[1]OptiY e.K., Aschaffenburg, Germany
[2]Institute of Electro-Mechanical and Electronic Design, TU Dresden, Germany

One challenge in designing micro-electromechanical systems (MEMS) is considering the variability of design ... 扩展阅读

Mixing and Residence Time Distribution Studies in Microchannels with Floor Herringbone Structures

A. Cantu-Perez, S. Ping Kee, and A. Gavriilidis
University College London, Department of Chemical Engineering, Torrington Place, London, UK

The mixing characteristics and residence time distributions (RTDs) of a staggered herringbone microchannel ... 扩展阅读

Electro-Thermal Modeling of High Power Light Emitting Diodes Based on Experimental Device Characterization

T. Lopez[1], and T. Margalith[2]

[1]Philips Research, Aachen, Germany
[2]Philips Lumileds Lighting Company, San Jose, CA, USA

This paper presents a 3D finite element model in COMSOL for the electro-thermal analysis of high power light ... 扩展阅读

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