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MEMS and Nanotechnology

基于非共面叉指电极的MEMS电容式压力传感器

刘振宇 [1], 赵湛 [1], 杜利东 [2], 方震 [1],
[1] 中国科学院大学/中国科学院电子学研究所、北京、中国
[2] 中国科学院电子学研究所、北京、中国

针对MEMS电容式压力传感器的非线性和空腔引线问题，提出一种非共面叉指电极结构，叉指电极重叠面积变化反映电容变化，从而改善了传感器的线性度。此外，腔外设计的叉指电极还避免了复杂的制造工艺。 ... 扩展阅读

植入电极阵列的人体耳蜗模型仿真

李福祥 [1]
[1] 清华大学

对于神经性听力缺陷患者而言，人工耳蜗是目前主要的恢复手段。人工耳蜗通过植入体内的电极阵列产生电流，直接刺激耳蜗的螺旋神经节细胞，引起听觉系统响应。因此，研究植入耳蜗内电极阵列产生的电势分布特点具有重要意义 ... 扩展阅读

Computing Surface Acoustic Wave Dispersion and Band Gaps

R. Westafer [1], S. Mohammadi [1], A. Adibi [1], W. Hunt [1]
[1] School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA

The dispersion of surface acoustic waves (SAWs) has long been studied for diverse applications ranging from ... 扩展阅读

Simulation of the Electrical Properties of Conductive ITO Thin Films by Finite Element Analysis

R. A. Gerhardt [1], N. Xia [1], Y. Jin [1],
[1] Georgia Institute of Technology, Atlanta, GA, USA

Finite element analysis (FEA) can be used to study the electrical properties of conductive ITO thin films. ... 扩展阅读

On The Directional Response of Multi-Driver Column Loudspeaker Configurations Using FEA and BEM

R. Balistreri [1],
[1] Klipsch Group, Inc, Indianapolis, IN, USA

Column Loudspeakers employ multiple drivers to get close to a radiating line source. A line source gives ... 扩展阅读

Modeling, Simulation, and Optimization of Piezoelectric Bimorph Transducer for Broadband Vibration Energy Harvesting in Two-piece Trapezoidal Approach

N. Chen [1], V. Bedekar [1],
[1] Middle Tennessee State University, Murfreesboro, TN, USA

The objective of the research is to design a broadband energy harvester device through the two-piece non ... 扩展阅读

Analysis of Mechanical Sensitivity of MEMS Pressure Diaphragm for Contact Formation

S. Shubham [1], M. Nawaz [1],
[1] Knowles Electronics, Itasca, IL, USA

MEMS Pressure sensors work on the principle of mechanical bending of thin diaphragm under applied load over ... 扩展阅读

Time-dependent Thermoelectric Switching in Vanadium Oxide

G. Àbel [1], F. Torres [1], M. Kiwi [1],
[1] Universidad de Chile, Santiago, Región Metropolitana, Chile

We report the reversible thermoelectric switching [1, 2, 3] induced by a time dependent and frequency domain ... 扩展阅读

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