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Efficient Anchor Design for Quality Factor Enhancement in a Silicon Nitride-on-Silicon Lateral Bulk Mode Resonator

U. Rawat[1], A. DasGupta[1], D. R. Nair[1], V. V. Pasula[1]
[1]Department of Electrical Engineering, Indian Institute of Technology Madras, Chennai, Tamil Nadu, India

Anchor loss causes a reduction in the quality factor of high frequency micromechanical resonators. This study ... 扩展阅读

Design and Simulation of MEMS Based Piezoelectric Vibration Energy Harvesting System

M. C. B. Kumar[1], D. B. Prabhu[1], R. Akila[1], A. Gupta[1], M. Alagappan[1]
[1]PSG College of Technology, Coimbatore, Tamil nadu, India

This paper discusses the simulation studies on a vibration based energy harvesting system to convert the ... 扩展阅读

Magnetic Devices For a Beam Energy Recovery THz Free Electron Laser

R. R. S. Caetano[1], G. Cernicchiaro[2], R. M. O. Galvão[3]
[1]Universidade Federal do Rio de Janeiro, Macaé, RJ, Brazil
[2]Centro Brasileiro de Pesquisas Físicas, Rio de Janeiro, RJ, Brazil
[3]Instituto de Física USP, São Paulo, SP, Brazil

This paper presents a numerical analysis of magnetic devices, dipole, quadrupole and undulator and a THz Free ... 扩展阅读

Modeling and Analysis of Aberrations in Electron Beam Melting (EBM) Systems

D. Svensson [1], A. Azhirnian [2],
[1] Arcam AB, Mölndal, Sweden
[2] Chalmers University of Technology, Gothenburg, Sweden

Arcam AB has pioneered additive manufacturing using the electron beam melting (EBM) technology which provides ... 扩展阅读

Electron Drift in Xe Gas

T. J. Berger [1],
[1] Department of Physics, Applied Physics, and Astronomy, Rensselaer Polytechnic Institute, Troy, NY, USA

The XENON Dark Matter Experiment utilizes ultra-pure xenon (Xe) as a target for particle interaction in the ... 扩展阅读

Design and Analysis of 3D Capacitive Accelerometer for Automotive Applications

G. Vijila, S. Vijayakumar, M. Alagappan, and A. Gupta
PSG College of Technology
Coimbatore
Tamil Nadu, India

This paper projects a novel 3D capacitive accelerometer design to identify a severe accident and initiate ... 扩展阅读

A Wide Range MEMS Vacuum Gauge Based on Knudsen’s Forces

V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
Chennai, India

A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated ... 扩展阅读

Residual Stress in the Silicon Membrane of Circular CMUT

A. T. Galisultanov [1], P. Le Moal [1], V. Walter [1], G. Bourbon [1],
[1] FEMTO-ST, Besanson, France

During last twenty years capacitive micromachined ultrasonic transducers (CMUT) have been developed extremely ... 扩展阅读

Simulation of the Impedance Response of Thin Films as a Function of Film Conductivity and Thickness

Y. Jin [1], S. Kumar [1], R. A. Gerhardt [1],
[1] School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA

Introduction The electrical properties of materials are important in many different applications. In ... 扩展阅读

Thickness Optimization of a Piezoelectric Converter for Energy Harvesting

M. Guizzetti[1], V. Ferrari[1], D. Marioli[1], and T. Zawada[2]

[1]Dept. of Electronics for Automation, University of Brescia, Brescia, Italy
[2]Meggitt, Ferroperm Piezoceramics A/S, Kvistgaard, Denmark

The conversion of mechanical energy from environmental vibrations into electrical energy is a key point for ... 扩展阅读

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