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Thin Low Permittivity Gap
Posted 2010年7月14日 GMT-4 14:35 0 Replies
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I´m modeling a parallel plate capacitive accelerometer in COMSOL v4.0. One of the difficulties I´m facing now is that I can not mesh the 2um gap between the botton and the top electrodes (silicon), the dielectric material is air. During the mesh generation I always get an error "Internal error in boundary respecting".
There are a few discussions on how to mesh thin geometries, however I could not figure out a way to solve my problem. I realised today that in the electrostatic interface there is a thing called "Thin Low Permittivity Gap", which probably does exactly what I was intending to do. However there is only a few lines of explanation about this feature in the AC/DC user´s guide. Can anyone help me with that? One of my doubts is whether or not it is still necessary to include a "block" in the geometry to represent the dielectric.
I based my model on the 3.5 tutorial model "comb_drive_2d" with the necessary adaptations to my 3D geometry.
Thanks
Hello Andre Teves
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