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功率沉积到双频容性耦合等离子体中的谐波量

Application ID: 10218


一个容性耦合等离子体(CCP)中的时变静电场中的能量传递并不完全 RF 的二倍频消耗,由于在这个过程中的高度非线性,功率沉积将发生在比二倍频更高的频率。对于双频 CCP 反应器,在很多不同频率上会发生谐波。

This model is included as an example in the following products:

等离子体模块

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