快速搜索

离子注入器

Application ID: 10011


本案例考虑离子注入系统的设计,一个重要的设计需求是,在离子束方向上,排气分子的数密度必须很小。本模型中,计算了一个目标排气圆片绕轴放置时,在离子束路径上的数密度。

This application is included as an example in the following products:

分子流模块

The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the 技术规格表 and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.