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MEMS and Nanotechnology

Residual Stress in the Silicon Membrane of Circular CMUT

A. T. Galisultanov [1], P. Le Moal [1], V. Walter [1], G. Bourbon [1],
[1] FEMTO-ST, Besanson, France

During last twenty years capacitive micromachined ultrasonic transducers (CMUT) have been developed extremely ... 扩展阅读

Three-Dimensional Modeling of Electrical Scanning Probe Microscopy Problems

G. Gomila [1], L. Fumagalli [2], R. Fabregas [3],
[1] Institut de Bioenginyeria de Catalunya (IBEC), Departament d’Electrònica, Universitat de Barcelona, Barcelona, Spain
[2] School of Physics and Astronomy, University of Manchester, Manchester, United Kingdom
[3] Institut de Bioenginyeria de Catalunya (IBEC), Universitat de Barcelona, Barcelona, Spain

Electrical scanning probe microscopy (SPM) techniques, such as electrostatic force microscopy, nanoscale ... 扩展阅读

Modeling and Simulation of Damping Resistance of a Cantilever Based Energy Harvester

M. I. Hassan [1], A. Brimmo [1], A. N. Chatterjee [2],
[1] Masdar Institute of Science and Technology, Abu Dhabi, UAE
[2] MEMS Department, GLOBALFOUNDRIES, Singapore, Singapore

The multilayer composite single mass cantilever is a MEMS energy harvester structure. The vibrating structure ... 扩展阅读

Nonlinear Optics in Plasmonic Nanostructures

G. Bachelier [1], L. Olgeirsson [1], S. Waterman [2], J. Sharma [3], E. Dujardin [3], A. Bouhelier [4], S. Huant [1]
[1] Institut Néel, CNRS - Joseph Fourier University, Grenoble, France
[2] Imperial College, London, England
[3] CEMES, CNRS, Toulouse, France
[4] LICB, CNRS – Bourgogne University, Dijon, France

The unique optical properties of plasmon resonances in noble metal nanoparticles have been extensively ... 扩展阅读

Stress Induced by Silicon-Germanium Integration in Field Effect Transistors

R. Berthelon [1], D. Dutartre [1], F. Andrieu [2]
[1] STMicroelectronics, France
[2] CEA Leti, France

The integration of high level of stress in field effect transistors is performed through incorporation of ... 扩展阅读

Enhanced Second-Harmonic Generation in AlGaAs Nanoantennas

L. Carletti [1], D. Rocco [1], A. Locatelli [1], C. De Angelis [1],
[1] University of Brescia, Italy

We designed AlGaAs all-dielectric nanoantennas with magnetic dipole resonance at near-infrared wavelengths. ... 扩展阅读

Simulation of a Thermoelectric Spiral Structure

A. Arevalo [1], J. P. Rojas [1], D. Conchouso [1], M. M. Hussain [1], I. G. Foulds [2]
[1] Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Okanagan Campus, Canada

Energy efficiency and harvest, speed and performance, flexibility and portability are key elements for ... 扩展阅读

FEM Modeling in Robust Design for Graphene-Based Electromagnetic Shielding

S. Elia [1], G. Granata [1], P. Lamberti [1], V. Tucci [1],
[1] University Of Salerno, Italy

Electromagnetic shielding design is usually approached referring to nominal values of the main parameters. ... 扩展阅读

Calculation of Surface Acoustic Waves on a Piezoelectric Substrate using Amazon™ Cloud Computing

U. Vogel [1], M. Spindler [1], S. Wege [1], T. Gemming [1]
[1] Leibniz Institute for Solid State and Materials, Dresden, Germany

In this work, we seek to simulate SAWs for a better understanding and to benchmark the currently available ... 扩展阅读

Parametric Simulation of PZT Diameter to Hole Ratio for Optimized Membrane Displacement

A. Arevalo [1], D. Castro [1], D. Conchouso [1], I. G. Foulds [2]
[1] Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Saudi Arabia
[2] The University of British Columbia, School of Engineering, Okanagan Campus, Saudi Arabia

For our simulation we used the Piezoelectric Devices interface. The structure was set with (clamped) fix ... 扩展阅读

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