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MEMS and Nanotechnology

VLSI Layout Based Design Optimization of a Piezoresistive MEMS Pressure Sensors using COMSOL Multiphysics

R. Komaragiri[1], Sarath. S.[1], N. Kattabomman[1]
[1]NIT Calicut, Kozhikode, Kerala

This paper focuses on the diaphragm design and optimization of a piezoresistive Micro Electro Mechanical ... 扩展阅读

Quartz Transducer Modeling for Development of BAW Resonators

L.B.M. Silva[1], E.J.P. Santos[1]
[1]Laboratory for Devices and Nanostructures, Electronics and Systems Department, Universidade Federal de Pernambuco, Recife, PE, Brasil

Transducer optimization is a key aspect for successful development and deployment of advanced sensors, ... 扩展阅读

3D Stationary and Temporal Electro-Thermal Simulations of Metal Oxide Gas Sensor Based on a High Temperature and Low Power Consumption Micro-Heater Structure

N. Dufour[1], C. Wartelle[2], P. Menini[1]
[1]LAAS-CNRS, Toulouse, France
[2]Renault, Guyancourt, France

The aim of this work was to simulate the electro-thermal behavior of a micro-hotplate used as a gas sensor, ... 扩展阅读

Optimized Cantilever-to-Anchor Configurations of Buckled Cantilever Plate Structures for Transducer Applications

A. Arpys Arevalo Carreno[1], D. Conchouso Gonzalez[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Mecca, Kingdom of Saudi Arabia

The mechanical simulation and analysis of the cantilever-to-anchor configuration for an out-of-plane ... 扩展阅读

Numerical Modeling of a MEMS Sensor with Planar Coil for Magnetic Flux Density Measurements

J. Golebiowski[1], S. Milcarz[1]
[1] Department of Semiconductor and Optoelectronics Devices, Technical University of Lodz, Lodz, Poland

The silicon cantilever with the planar coil was applied to the magnetic flux density measurements. The ... 扩展阅读

Study of Thermal Behavior of Thermoset Polymer Matrix Filled with Micro and Nanoparticles

B. Reine[1], J. Di-Tomaso[2], G. Dusserre[1], P. Olivier[1]
[1]Université de Toulouse, UPS, INSA, Mines Albi, ISAE, ICA, IUT, Dept. GMP, Toulouse Cedex, France
[2]RESCOLL - Société de Recherche, Pessac Cedex, France

This paper addresses the study of thermal behavior of thermoset polymer matrix filled with microparticles. A ... 扩展阅读

Analysis of Fluid Pumping with a Throttle Type Piezoelectric Micro Pump

B. Pe?ar[1], D. Križaj[1], D. Vrta?nik[1], D. Resnik[1], U. Aljan?i?[1], M. Možek[1], T. Dolžan[1], A. Slavko[1]
[1]Faculty of Electrical Engineering, UNI of Ljubljana, Ljubljana, Slovenia

Operation of a modified type microthrottle (MT) pump is analyzed by numerical simulation. Conventional MT ... 扩展阅读

Air Convection on a Micro Hotplate Gas Sensor

S. Gidon[1], M. Brun[1], S. Nicoletti[1], P. Barritault[1]
[1]Commissariat Energie Atomique, LETI, Minatec Campus, Grenoble, France

Monitoring of indoor CO2 concentration is of particular interest to detect room occupancy in order to ... 扩展阅读

Modeling of Silicon Piezoresistive Pressure Sensor: Application to Prevent Some Diabetes Complications

F. Kerrour[1], A. Beddiaf[1], M. Benabbas-Marir[1]
[1]MODerNa Laboratory, University Mentouri, Constantine, Algeria

Several analytical solutions describing the mechanical behavior of a silicon micro membrane deflection, ... 扩展阅读

Positioning System for Particles in Microfluidic Structures

D. Kappe[1], A. Hütten[1]
[1]University of Bielefeld, Bielefeld, Germany

The possibility to detect and probe molecules in microfluidic devices gives rise to interesting applications. ... 扩展阅读

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