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MEMS Pirani Sensor for Pressure Measurements in the Fine- and High-Vacuum Range

M. Grau[1], F. Völklein[1], A. Meier[1], C. Kunz[1], P. Woias[2]
[1]RheinMain University of Applied Sciences, Institute for Microtechnologies, Rüsselsheim, Germany
[2]University of Freiburg, Department of Microsystems Engineering, Freiburg, Germany

A high performance MEMS Pirani sensor (VAC_03) was designed and optimized based on analytics. Due to the fact ... 扩展阅读

Structural Analysis of a Pressure Sensor for High Temperature Environments

S.V. De Guido[1], G.S. Masi[1], P. Vladimirovich Miodushevsky[1], L. Vasanelli[1]
[1]Department of Innovation Engineering, University of Salento, Lecce, Italy

Pressure sensors operating at the temperature higher that 500 °C are absent in the world market. Our goal is ... 扩展阅读

Design and Simulation of MEMS based Micro Pressure Sensor

P. Acharya[1]
[1]B.V.Bhoomaraddi College of Engineerring & Technology, Hubli, Karnataka, India

The world is getting digitalized, demands for new and emerging technologies have reached its peak, and ... 扩展阅读

Simulation and Fabrication of Wireless Passive MEMS Pressure Sensor

E.A. Unigarro Calpa[1], D.A. Sanz Becerra[1], A. Arciniegas[2], F. Ramirez[1], F. Segura-Quijano[1]
[1]Universidad de los Andes, Bogotá, Colombia
[2]Instituto Barraquer de América, Bogotá, Colombia

A wireless passive pressure sensor and the measurement system were design and simulated using COMSOL 4.3. The ... 扩展阅读

µHeater on a Buckled Cantilever Plate for Gas Sensor Applications

A. Arpys Arevalo Carreno[1], E. Byas[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Mecca, Kingdom of Saudi Arabia

In semiconductor gas sensors, the base of the gas detection is the interaction of the gaseous species at the ... 扩展阅读

Carbon Nanotube Based Mass Sensor Using Atomic Resolution Nanomechanical Resonators

M. Roshini[1], G .B. Priyanga[1], K. C. Devi[1]
[1]PSG College of Technology, Coimbatore, Tamil Nadu, India

The objective of this paper is to design and simulate Carbon Nano-Tube (CNT) based mass sensor that ... 扩展阅读

App for the thermal simulation of power electronics test devices

Daniel Tscharnuter¹
¹KAI Kompetenzzentrum Automobil- und Industrieelektronik GmbH

In power electronics applications, microelectronic chips face swift temperature changes during operation, ... 扩展阅读

Simulation of a Capacitive Sensor for Wear Metal Analysis of Industrial Oils

P. Venkateswaran[1], R. Minasamudram[1], P. Agrawal[2]
[1]Siemens Technology and Services Pvt. Ltd, Bangalore, Karnataka, India
[2]Indian Institute of Technology - Bombay, Mumbai, Maharashtra, India

Lubricant oil is used to ensure proper functioning of industrial machinery such as turbines, gears, bearings ... 扩展阅读

Modelling Thermal Time-of-Flight Sensor for Flow Velocity Measurement

O. Ecin[1], E. Engelien[2], M. Malek[2], R. Viga[2], B. Hosticka[1], and A. Grabmaier[2]

[1]Institut of Mikroelektronische Systeme, University Duisburg-Essen, Duisburg, Germany
[2]Institut of Elektronische Bauelemente und Schaltungen, University Duisburg-Essen, Duisburg, Germany

This communication reports on a numeric fluid dynamics simulation on a pipe flow model. The basic background ... 扩展阅读

Use of COMSOL Multiphysics for Automated Electrostatic MEMS Sensor Design

J.C. Blecke, and G.G. Parker
Michigan Technological University, Houghton, MI, USA

An automated design tool using COMSOL Multiphysics 3.5a and a genetic algorithm was developed to improve the ... 扩展阅读

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