快速搜索

MEMS 谐振器的热弹阻尼

Application ID: 1439


在设计 MEMS 谐振器时,热弹阻尼是很重要的系数,其反复的变形会产生局部温度变化和材料的热膨胀,因而产生阻尼,本案例为耦合热与结构方程式的三维模拟。

This model is included as an example in the following products:

MEMS 模块

The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the 技术规格表 and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.