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带粘性和热阻尼的振动微镜

Application ID: 14731


微镜是一种常用的MEMS器件,用来控制光学单元。本案例描述一个振动的微镜,周围是空气,通过热声-壳接口来模拟流固耦合作用,从而可以从周围的空气得到正确的粘性的热阻尼。微镜在扭动载荷作用下,通过频率响应和特征频率分析研究了谐振频率。系统中还包含一个简单的RLC电路模型。

This model is included as an example in the following products:

声学模块

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