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MEMS and Nanotechnology

COMSOL Multiphysics® Simulation Integrated into Genetic Optimization

V. Longinotti[1], S. Di Marco[1], S. Pistilli[1], F. Costa[1], M. Giusti[1], G. Gammariello[1], I. Gison[1], G. Latessa[1,2], D. Mascolo[2], A. Buosciolo[1]
[1]Altran Italia, Roma, Italy
[2]Consorzio DeltaTi Research, Milano, Italy

The main topic of this paper is the development of an innovative tool that can be applied in a wide range of ... 扩展阅读

A Computational Approach for Simulating p-Type Silicon Piezoresistor Using Four Point Bending Setup

T.H. Tan[1], S.J.N. Mitchell[1], D.W. McNeill[1], H. Wadsworth[2], S. Strahan[2]
[1]Queen's University Belfast, Belfast, United Kingdom
[2]Schrader Electronics Ltd, Antrim, United Kingdom

The piezoresistance effect is defined as change in resistance due to applied stress. Silicon has a relatively ... 扩展阅读

Novel Simulation of a Voltage-Driven Electro-Thermo-Mechanical MEMS Self-Oscillator

S. Ouenzerfi [1,2,3], H.A.C. Tilmans [2], S. El-Borgi[3,4], X. Rottenberg [2]
[1] KACST-Intel Consortium Center of Excellence in Nano-manufacturing Applications (CENA), Riyadh, KSA
[2] IMEC, Leuven, Belgium
[3] Applied Mechanics and Systems Research Laboratory, Tunisia Polytechnic School, University of Carthage, La Marsa, Tunesia
[4] Texas A&M University at Qatar, Mechanical Engineering Program, Engineering Building, Doha, Qatar

This paper presents the modeling and simulation of electro-thermo-mechanical self-oscillators, an emerging ... 扩展阅读

Fluid-structure Interaction Modeling of Air Bearing

H.R. Javani[1], P. Kagan[2], F. Huizinga[1]
[1]ASML - MDev – Mechanical analysis, Veldhoven, The Netherlands
[2]ASML - MDev – System Dynamics, Veldhoven, The Netherlands

Air bearings are special type of bearings which provide nearly zero friction between two surfaces. This is ... 扩展阅读

Degeneracy Breaking, Modal Symmetry and MEMS Biosensors

H.T.D. Grigg[1], T.H. Hanley[1], B.J. Gallacher[1]
[1]Newcastle University, Newcastle upon Tyne, United Kingdom

This work is concerned with systems possessing cyclic symmetries. In particular, we concentrate on the case ... 扩展阅读

Analyte Capture from Liquid Samples: Size Matters

M. Weber[1], M. Reed[1]
[1]Yale University, New Haven, CT, USA

Arrays of vertical pillars, Micro Purification Chips, have been widely used for analyte capture from liquid ... 扩展阅读

Empirical Model Dedicated to the Sensitivity Study of Acoustic Hydrogen Gas Sensors Using COMSOL Multiphysics®

A. Ndieguene[1], I. Kerroum[1], F. Domingue[1], A. Reinhardt[2]
[1]Laboratoire des Microsystèmes et de Télécommunications/Université du Québec à Trois-Rivières, Trois-Rivières, QC, Canada
[2]Laboratoire d’Électronique et des Technologies de l’Information, CEA, LETI Grenoble, France

Due to the increasing demand for hydrogen gas sensors for applications such as automation, transportation, or ... 扩展阅读

Finite Element Analysis of BAW Sensor

M. Hashiguchi[1], Y. Sumiyoshi[1]
[1]Keisoku Engineering System Co., Ltd., Tokyo, Japan

Achieving passive device working over two GHz bands for next generation mobile phone has been strongly ... 扩展阅读

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