TiN 在机械加工刀片上的化学气相沉积
Application ID: 130411
Chemical vapor deposition (CVD) is a process used to grow thin films on substrates. In this CVD example, metal inserts for machining tools are coated with titanium nitride (TiN). The titanium nitride layer improves the wear resistance of the metal inserts by increasing the hardness, reducing friction, and reducing oxidation. Additionally, due to its golden appearance, the coating process is also performed for aesthetic purposes.The CVD reactor in this example operates at low pressures and high temperatures. These operating conditions ensure high diffusion, which is needed for efficient mass transfer onto the substrate surfaces and for homogeneous deposition thicknesses.
案例中展示的此类问题通常可通过以下产品建模:
您可能需要以下相关模块才能创建并运行这个模型，包括：
- COMSOL Multiphysics® 和
- 以下模块之一： 电池模块, CFD 模块, 化学反应工程模块, 或 燃料电池和电解槽模块 和
- 以下模块之一： 电池模块, 化学反应工程模块, 腐蚀模块, 电化学模块, 电镀模块, 或 燃料电池和电解槽模块
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