MEMS Scanning Mirror
Application ID: 124281
MEMS scanning mirrors are a type of MEMS device that realizes optical path control by controlling mirror torsion through a microdriver. The torsion can be single axis or double axis. MEMS scanning mirrors are widely used in laser projection, laser radar, laser processing, and other fields.
In this case, the electrostatic driving torque is calculated by means of an analytical formula, as an alternative to moving mesh. The single-axis scanning micromirror, which is driven by an electrostatic comb, is modeled using a solid mechanics interface coupled to a geometric optics interface and with static and dynamic studies to describe a dynamic scanning process.
案例中展示的此类问题通常可通过以下产品建模:
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