MEMS Scanning Mirror
Application ID: 124281
MEMS scanning mirrors are a type of MEMS device that realizes optical path control by controlling mirror torsion through a microdriver. The torsion can be single axis or double axis. MEMS scanning mirrors are widely used in laser projection, laser radar, laser processing, and other fields.
In this case, the electrostatic driving torque is calculated by means of an analytical formula, as an alternative to moving mesh. The single-axis scanning micromirror, which is driven by an electrostatic comb, is modeled using a solid mechanics interface coupled to a geometric optics interface and with static and dynamic studies to describe a dynamic scanning process.
![](/model/image/124281/big.png)
案例中展示的此类问题通常可通过以下产品建模:
您可能需要以下相关模块才能创建并运行这个模型,包括:
建模所需的 COMSOL® 产品组合取决于多种因素,包括边界条件、材料属性、物理场接口及零件库,等等。不同模块可能具有相同的特定功能,详情可以查阅技术规格表,推荐您通过免费的试用许可证来确定满足您的建模需求的正确产品组合。如有任何疑问,欢迎咨询 COMSOL 销售和技术支持团队,我们会为您提供满意的答复。