薄膜体声波谐振器的 S 参数
Application ID: 67781
This model shows how to compute the S-parameter for a piezoelectric MEMS device by extending the tutorial Thin-Film BAW Composite Resonator. The measurement of S-parameter is commonly used to characterize such devices for RF applications. The terminal feature in the Electrostatics physics interface provides straightforward access to the computed S-parameters for frequency domain study types.